Title page for ETD etd-05202005-165204

Type of Document Master's Thesis
Author Bemben, Richard Matthew
URN etd-05202005-165204
Title Development of an Advanced Semiconductor Laboratory
Degree Master of Science
Department Electrical and Computer Engineering
Advisory Committee
Advisor Name Title
Hendricks, Robert W. Committee Co-Chair
Meehan, Kathleen Committee Co-Chair
Tront, Joseph G. Committee Member
  • semiconductor processing; VTPMOS; advanced laborat
Date of Defense 2005-05-04
Availability unrestricted
Engineering faculty and administration at the Virginia Polytechnic Institute and State University (Virginia Tech) have recognized the importance of producing competent scientists and engineers to work in the vast semiconductor industry, especially in the emerging technologies of microelectronics, optoelectronics, and nanotechnology. For this reason, the development of an undergraduate microelectronics minor as well as a more rigorous graduate curriculum has been actively pursued for several years. This paper details the development of an advanced semiconductor processing laboratory course, which serves as a three credit hour capstone course. The course covers circuit layout, semiconductor fabrication, and electrical testing. The following steps were taken in order to accomplish this task: choosing and customizing a computer aided design (CAD) software package for device layout, pMOS process integration on the toolset in the cleanroom facilities at Virginia Tech, and the development of a laboratory manual.
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