Title page for ETD etd-06282011-131050

Type of Document Master's Thesis
Author Hand, Davis Kyle
URN etd-06282011-131050
Title A Manufacturing Process for Single Micron Resolution Optical Gratings used in X-ray Computed Tomography
Degree Master of Science
Department Electrical and Computer Engineering
Advisory Committee
Advisor Name Title
Meehan, Kathleen Committee Chair
Orlowski, Marius Committee Member
Wyatt, Christopher L. Committee Member
  • Computed Tomography
  • Photolithography
  • Electroplating
  • DRIE
Date of Defense 2011-01-18
Availability unrestricted
X-ray Computed Tomography (CT) is a process that produces three-dimensional

x-ray images, allowing for better diagnosis and analysis of complex internal medical

conditions. New advances in the optical techniques used in this process promise to

produce better results while reducing patient risk. One of these developments calls for

precise optical gratings that can be expensive and difficult to manufacture. This paper

presents a simple process developed specifically for the production of these gratings

using cost effective techniques. The process uses well understood semiconductor

fabrication steps including oxidation, deep reactive ion etching and electroplating. While

not entirely successful, the process presented within provides a proof of concept for

development of the gratings and discusses improvements that could be made to allow for


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