Title page for ETD etd-08192002-161831

Type of Document Master's Thesis
Author Duemling, Martin
Author's Email Address duemling@gmx.edu
URN etd-08192002-161831
Title Modeling and characterization of nanoelectromechanical systems
Degree Master of Science
Department Materials Science and Engineering
Advisory Committee
Advisor Name Title
Evoy, Stephane Committee Chair
Heflin, James R. Committee Member
Reynolds, William T. Jr. Committee Member
  • Nanomechanical resonator
  • NEMS
  • Nanotechnology
Date of Defense 2002-08-15
Availability unrestricted
Microelectromechanical structures (MEMS) are used commercially in sensor applications

and in recent years much research effort has been done to implement them in wireless

communication. Electron beam lithography and other advancements in fabrication

technology allowed to shrink the size of MEMS to nanomechanical systems (NEMS).

Since NEMS are just a couple of 100 nm in size, highly integrated sensor applications

are possible. Since NEMS consume only little energy, this will allow continuous

monitoring of all the important functions in hospitals, in manufacturing plants, on

aircrafts, or even within the human body.

This thesis discusses the modeling of NEM resonators. Loss mechanisms of

macroscale resonators, and how they apply to NEM resonators, will be reviewed.

Electron beam lithography and the fabrication process of Silicon NEM resonator will be

described. The emphasis of this work was to build a test setup for temperature dependant

measurements. Therefore different feasible techniques to detect nanoscale vibration will

be compared and the setup used in this work will be discussed. The successful detection

of nanoscale vibration and preliminary results of the temperature dependence of the

quality factor of a paddle resonator will be reported. A new approach to fabricate NEM

resonator using electrofluidic assembly will be introduced.

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