Type of Document Master's Thesis Author Duemling, Martin Author's Email Address firstname.lastname@example.org URN etd-08192002-161831 Title Modeling and characterization of nanoelectromechanical systems Degree Master of Science Department Materials Science and Engineering Advisory Committee
Advisor Name Title Evoy, Stephane Committee Chair Heflin, James R. Committee Member Reynolds, William T. Jr. Committee Member Keywords
- Nanomechanical resonator
Date of Defense 2002-08-15 Availability unrestricted AbstractMicroelectromechanical structures (MEMS) are used commercially in sensor applications
and in recent years much research effort has been done to implement them in wireless
communication. Electron beam lithography and other advancements in fabrication
technology allowed to shrink the size of MEMS to nanomechanical systems (NEMS).
Since NEMS are just a couple of 100 nm in size, highly integrated sensor applications
are possible. Since NEMS consume only little energy, this will allow continuous
monitoring of all the important functions in hospitals, in manufacturing plants, on
aircrafts, or even within the human body.
This thesis discusses the modeling of NEM resonators. Loss mechanisms of
macroscale resonators, and how they apply to NEM resonators, will be reviewed.
Electron beam lithography and the fabrication process of Silicon NEM resonator will be
described. The emphasis of this work was to build a test setup for temperature dependant
measurements. Therefore different feasible techniques to detect nanoscale vibration will
be compared and the setup used in this work will be discussed. The successful detection
of nanoscale vibration and preliminary results of the temperature dependence of the
quality factor of a paddle resonator will be reported. A new approach to fabricate NEM
resonator using electrofluidic assembly will be introduced.
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